Views: 0 Author: Site Editor Publish Time: 2026-04-13 Origin: Site
From March 25th to 27th, Semicon China 2026, hosted by the International Semiconductor Industry Association (SEMI), concluded successfully. As a global semiconductor industry event, this exhibition brings together core enterprises, technical elites and industry partners upstream and downstream of the industry chain, becoming the core stage to showcase global semiconductor technology iterations and industrial layout.
As a high-tech enterprise specializing in mass spectrometry research and development and semiconductor gas detection, Shanghai Aike Rui Technology Co., Ltd. (ACT) has been deeply involved in the field of mass spectrometry for many years. The team comes from universities and scientific research institutes. With ACT-Accurate as its brand concept, it focuses on the core requirements of "high precision, high stability, and high safety" for chip manufacturing. This time, the company made a grand debut with its new generation MLS211M integrated intelligent all-in-one online gas analyzer with completely independent intellectual property rights. With its independent hard-core capabilities in the entire chain, it became the focus of the scene and gained great attention and wide recognition from the industry.
From core ion sources and high-precision detectors to complete systems, intelligent software and communication protocols, iKree has achieved 100% self-research and domestic production of key components, comprehensively building independent capabilities in the "materials-components-systems-software-communications" chain, with accuracy, stability and reliability, building a solid line of defense for semiconductor process safety and yield improvement.
For a long time, the semiconductor process gas detection and residual gas analysis (RGA) market has been monopolized by European, American and Japanese companies, which has become a "stuck" pain point that restricts the high-quality development of the domestic semiconductor industry. Faced with the industry"s difficulties, Aikerui bucked the trend and broke through. The exhibition launched the MLS211M high-precision semiconductor process gas process detector, officially starting the domestic high-end online gas analysis breakthrough battle and injecting strong impetus into domestic substitution.
A new generation of integrated intelligent all-in-one online gas analyzer
MLS211M is specially designed for the harsh environment of advanced chip manufacturing. It is a multi-functional gas analysis solution that integrates leak detection, process gas monitoring, cavity cleanliness detection, and process end-point detection. It comprehensively covers the high-precision process monitoring and quality control needs of semiconductor manufacturing.
MLS211M product main picture
Core technology highlights
- Ultra-high detection sensitivity
The lowest detection limit can reach 3e-13 Pa, accurately identify ppb-level trace impurity gases, and effectively avoid chip defects caused by trace impurities such as O₂, H₂O.
-Wide range and high resolution
The molecular mass detection range is up to 300 amu, and the mass spectrum resolution is adjustable from 0.5–2.5 amu, which avoids misjudgment of SiH₄, NH₃ and other process gases and H₂O, CO impurities, and allows simultaneous monitoring of multiple gases.
- Extremely fast response speed
The fastest dwell time is 1ms, and the test response is less than 1s. It captures process changes in real time and avoids excessive etching/deposition affecting wafer yield.
- High stability and anti-pollution ability
The ion source has an anti-corrosion design and is resistant to corrosive gases such as Cl₂ and F₂; it supports in-situ cleaning, has small drift during long-term operation, and does not require frequent calibration, significantly reducing maintenance costs.
- Super compatibility and automated integration
The molecular pump and the backing pump are designed separately. The body is compact and can be directly connected to the chamber/vacuum pipeline. It supports the SEMI standard SECS/GEM protocol and seamlessly connects to the MES system to achieve "automatic detection-data upload-abnormal alarm" closed-loop control.
- All-in-one convenient design
Built-in multi-pressure response valve group, covering normal pressure to ultra-high vacuum; built-in standard gas/standard leakage, one-click calibration; with installation guide rail, installation at any angle, excellent ease of use.
MLS211M functional diagram
Typical applications in all scenarios (four core scenarios)
1. Leak detection and location
Extremely fast response, high-precision sensitivity, multi-component simultaneous identification, in-situ non-invasive leak detection, and accurate leak source tracing.
2. Process gas monitoring
In-situ direct mining, trace-level precision, multi-component simultaneous analysis, and intelligent data linkage support active process optimization.
3. Cavity cleanliness inspection
Real-time pollution warning, high sensitivity capture of trace pollutants, multi-component full coverage at one time.
4. Process end-point detection
Processes such as etching/film stripping can accurately determine the end point and achieve closed-loop control through changes in by-product concentration.
Leak test data graph
Cavity cleanliness/etching endpoint monitoring chart
Quick look at core specs
- Quality range: 1–300u, resolution 0.5–2.5u
- Total pressure range: 5E-9 mbar ~ 1000 mbar
- Minimum detectable partial pressure: minimum 1e-13 mbar
-Scan speed: 1ms–16s/u
- Communication: Support SECS/GEM, MES docking
- Dimensions: 593180366mm, weight 10–13kg
It is worth noting that MLS211M has completed production line verification and achieved batch sales at many leading semiconductor customers. Orders have continued to be placed, fully confirming product performance and market recognition, and further consolidating Ikerui"s leading position in the field of high-end gas detection for domestic semiconductors.
We will protect the safety of semiconductor processes with all-in-one research and reshape the testing landscape with full-chain independence. Ikerui has always focused on technological innovation and is deeply involved in the research and development of high-end mass spectrometry and gas analysis equipment, helping the domestic semiconductor industry break foreign monopoly and achieve independent control.
