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Simple and reliable gas analysis solutions
Online gas analysis system
Built-in quadruple mass spectrometer
Fourth-level mass spectrometry process analysis is a fast, sensitive and reliable method that can accurately qualitatively and quantitatively detect various types of gas phase molecules. It can quickly solve customers' various complex gas analysis and testing problems.
ACT's process gas analyzer integrates high sensitivity, high stability and intelligent operation, and is the perfect solution for vacuum analysis using mass spectrometry technology.
ACT's innovative technology is designed to greatly improve the ease of use, performance and reliability of gas process detection analyzers, giving you peace of mind. It represents a new achievement of our long-term focus on rapid gas analysis technology.
PGA is an ideal solution for tasks ranging from quality control, leak detection and complex qualitative and quantitative analysis of residual gases.
High sensitivity, high stability and intelligent operation
Clear and easy-to-read platform software
Modular design
PGA is an ideal solution for tasks ranging from quality control, leak detection and complex qualitative and quantitative analysis of residual gases.
Ready-made applications to connect your mass spectrometer to your PLC
We have many years of customer accumulation and application experience
■ Long life dual filament structure
■ Minimum detectable partial pressure 3 ·10-15 hPa (mbar)
■ Built-in full-scale vacuum gauge for easy measurement of total pressure
■ Software operation is intuitive and saves time
■ Comprehensive technical support and globally unified on-site service
■ JSON programming interface facilitates system integration of PV MassSpec measurement programs
Simple and reliable gas analysis solutions
Online gas analysis system
Built-in quadruple mass spectrometer
■ User-friendly and intuitive operation
■ Automatic measurements via built-in programs
■ Leak detection and vacuum diagnostics with just one click
■ Automatic calibration and adjustment
■ Simple and defined measurement methods
■ Mass spectrometer data can be linked to external signals
A successful gas analysis solution depends largely on the application conditions.Here are a few common applications and where ultra-high reliability can be achieved
Example of an ideal configuration solution for the result.
Special gas analysis
-High vacuum environment process testing
-Leak analysis
-Special gas cylinder impurity removal monitoring
-Cleaning process monitoring
Semiconductor Process Analysis
Suitable for process monitors used in semiconductor processes such as MBE, Coating, PVD, etc.
- Chemical gas phase reactions;
- Cavity leakage analysis;
- Identify trace contaminants;
- Penetration testing;
Residual gas analysis
-High vacuum chamber analysis and detection
-Background gas analysis of large and small vacuum chambers
-High vacuum impurity removal residual atmosphere test
Technical Parameters
Measuring range | ||||||||
Measuring range | from 1 to 100amu (200/300 optional) | |||||||
进sample system | Vacuum flange, injection tube, etc. | |||||||
vacuum flange | CF35 | |||||||
Configurable inlet body and docking bellows | ||||||||
Auxiliary heat (optional) | 200/350℃ auxiliary heat | |||||||
mass spectrometer |
PGA F1 |
PGA F2 |
PGA F3 |
PGA M1 |
PGA M2 |
PGA M3 | ||
Detector | Faraday (F) | C-SEM/Faraday (M) | ||||||
Quality range | 1–100u | 1–200u | 1–300u | 1–100u | 1–200u | 1–300u | ||
Quadrupole diameter/length | 6mm/125mm | |||||||
Minimum detectable partial pressure, Faraday3) 4·10-13 hPa | 5·10-13 hPa | 7·10-13 hPa | ||||||
Minimum detectable partial pressure, C-SEM3)4) – | – | – | 3·10-15 hPa | 4·10-15 hPa | 5·10-15 hPa | |||
Ar sensitivity, Faraday5) 5 · 10-4 A/hPa | 4 · 10-4 A/hPa | 3 · 10-4 A/hPa | 5 · 10-4 A/hPa | 4 · 10-4 A/hPa | 3 · 10-4 A/hPa | |||
Maximum operating pressure, Faraday operation | 5·10-4 hPa | |||||||
Maximum operating pressure, C-SEM operation – | – | – | 5·10-5 hPa | 5·10-5 hPa | 5·10-5 hPa | |||
Adjacent quality interference (40/41) < 10 ppm | < 20 ppm | < 50 ppm | < 10 ppm | < 20 ppm | < 50 ppm | |||
maximum operating temperature, analysis unit 200 °C (max. 150 °C when operating with SEM) | ||||||||
Operating temperature, electronics | 5 – 50°C | |||||||
baking temperature, analyzer | 300°C | |||||||
Butt flange | DN 40CF-F | |||||||
Resolution at 10% peak height | 0.5 – 2.5 u | |||||||
Scan speed | 1 ms – 16 s/u | |||||||
Peak ratio repeatability | ±0.5% | |||||||
Communication Interface | Ethernet | |||||||
powered by | 100–240 V AC, 50/60 Hz | |||||||
PGA | ||||||||
Total weight | 6-12kg | |||||||
size | 550*210*270(L*W*H) | |||||||
Molecular pump (optional) | 67 L/s (N2) |
Application consulting and services
Application consulting
ACT application engineers will analyze your application and provide recommendations on how to optimize gas analysis testing
Service and support options
ACT has a global network of professional service personnel and a variety of support options
– Fulfill your needs
– Maximize work efficiency
– Ensure your instrument is fully capable of complex applications
Complete gas analysis testing solutions
ACT Vacuum represents global innovative and customized gas analysis testing solutions, Technical perfection, Sound advice and reliable service
Full coverage of gas analysis products
We have products and solutions for everything from mass spectrometry to spectroscopy, Solve your gas analysis in multiple complex gases and complex environments, and match a wide range of gas analysis testing applications.
theoretical and practical skills
Benefit from our expertise and our training!We support your gas stripping analysis , And provide you with first-class on-site service.