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Simple and reliable gas analysis solutions
Online gas analysis system
Quaternary mass spectrometry leak detection
The combination of highly sensitive sensors and intelligent operation makes the MLS211 the perfect solution for leak testing.
Full pressure range measurement
Process monitoring pressure range up to 1x10-7 to 1000 mbar
In-situ analysis, monitoring, and quantification of chemical reaction results.
Brand new software
The newly developed operating software is easier to use and more reliable.All measurement results can be saved and uploaded to the designated location.A new generation of efficient gas analysis solutions, intelligent software, easy operation and compact design.
All in one
Brand new MLS 211 is equipped with high-performance turbomolecular pump and diaphragm pump, oil-free The high vacuum environment provides an excellent background for mass spectrometry analysis. Different sampling systems can provide a wide range of testing solutions for your gas analysis; universal measurement procedures and high-quality integrated high-tech components.
typical application
Residual gas analysis
It provides a solution for the analysis of residual gas in vacuum systems. Many applications require the composition or partial pressure of residual gas to be monitored until the desired limit is reached. Our MLS can perfectly test the residual gas composition.
Tests on surface properties, desorption behavior, purity and tightness tests of materials, as well as on the composition of process gases.This mass spectrometry system can complete the test and can also provide the user with important information on the condition of the vacuum chamber.
Scan comparison of intact battery (red) and battery leaking electrolyte
Leak detection
MLS The 211 has a designated gas leak detection mode that can be activated through software control.
This feature makes it easier for users to detect any leaks in the vacuum system.
DMC leakage test 1.7e-5mbar.I/s
process observation
The MLS211 can observe any number of selected mass intensities over a measurement range up to 300 amu.Alarm cycle thresholds can be set for selected qualities.If they are above or below desired limits, the signals can be provided to higher-level control systems via digital outputs.This allows MLS211 Provides real-time process observation and control.EVN116 (Optional) gas control valve system to adapt to the pressure requirements of the relevant process, and an additional integrated shut-off valve can To quickly shut down and protect the mass spectrometry system in the event of a system leak.
Quality assurance and process optimization
It is considered that the change of gas concentration within a certain time range of several specific processes can be selected, the gas composition can be monitored, the ability to quantitatively measure and determine the purity and type of process gases, and the ability to monitor gas composition related to the vacuum coating process are considered It is an important tool for process documentation and quality assurance.The entire process flow can be traced, and the entire process can be measured and analyzed without stopping the measurement.All measurements can be exported for further analysis.
Respiratory process test (specific version)
Communication interface information
| I/O options | Analog output | Analog input | digital output | digital input |
| quantity | 8 | 8 | 10 | 5 |
| Specification | 0-10V | (-10-+10V) | Vout=24V | Vin=24V |
| resolution | 16 bits | 16 bits | － | － |
| Application examples | Measurements; Example: ion current concentration ratio; Data is transferred to higher level systems. | Read external parameters; Example: pressure, temperature, flow rate | valve actuation; Free range switching | Ways to start or stop measurement tasks with external signals |
Technical Parameters
| Turbomolecular pump | HiCube Eco | |||||
| power | 170W | |||||
| Voltage | 110-240V;50/60Hz | |||||
| Pumping speed for helium | 67l/s | |||||
| Pumping speed of the backing pump | 1m3/h | |||||
| ultimate pressure | <1·10-7hpa | |||||
| vacuum gauge | PKR 361 Pirani/cold cathode gauge | |||||
| Measuring range | 1·10-9-1·103hpa | |||||
| Sampling system valve block | EVN 116 Gas metering/stop valve | |||||
| flow | Adjustable flow range 5·10-6 -3·103 hPa l/s | |||||
| connecting flange | DN 16 ISO-KF | |||||
| Detector | Faraday(F) | C-SEM/Faraday (F) | ||||
| Quality range | 1-100u | 1-200u | 1-300u | 1-100u | 1-200u | 1-300u |
| Quadrupole diameter/length | 6mm/125mm | |||||
| Minimum detectable partial pressure, Faraday | 4·10-13hpa | 5·10-13hpa | 7·10-13hpa | |||
| Minimum detectable partial pressure, C-SEM | 3·10-15hpa | 4·10-15hpa | 5·10-15hpa | |||
| Ar Sensitivity Faraday | 5·10-4A/hpa | 4·10-4A/hpa | 3·10-4A/hpa | 5·10-4A/hpa | 4·10-4A/hpa | 3·10-4A/hpa |
| Maximum operating pressure, Faraday | 5·10-4hpa | |||||
| Maximum operating pressure, C-SEM | 5·10-5hpa | 5·10-5hpa | 5·10-5hpa | |||
| Adjacent quality interference (40/41) | <10ppm | <20ppm | <50ppm | <10ppm | <20ppm | <50ppm |
| Maximum operating temperature, analysis unit | 200℃ (maximum 150℃ when SEM is turned on) | |||||
| Operating temperature | 5-50℃ | |||||
| Baking temperature | 300℃ | |||||
| Butt flange | DN 40CF-F | |||||
| Resolution at 10% peak height | 0.5-2.5u | |||||
| Scan speed | 1ms-16s/u | |||||
| Peak specific gravity linear | ±0.5% | |||||
| Communication Interface | Ethemet | |||||
| powered by | 100-240V AC,50/60Hz | |||||
| MLS211 | ||||||
| Total weight | 25.5-26.2kg | |||||
Application consulting and services
Application consulting
ACT application engineers will analyze your application and provide recommendations on how to optimize gas analysis testing
Service and support options
ACT has a global network of professional service personnel and a variety of support options
– Fulfill your needs
– Maximize work efficiency
– Ensure your instrument is fully capable of complex applications
Complete gas analysis testing solutions
ACT Vacuum represents global innovative and customized gas analysis testing solutions, Technical perfection, Sound advice and reliable service
Full coverage of gas analysis products
We have products and solutions for everything from mass spectrometry to spectroscopy, Solve your gas analysis in multiple complex gases and complex environments, and match a wide range of gas analysis testing applications.
theoretical and practical skills
Benefit from our expertise and our training!We support your gas stripping analysis ， And provide you with first-class on-site service.
