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RGA residual gas analyzer
-Molecular beam epitaxy MBE
-Physical Vapor DepositionPVD
-Chemical Vapor DepositionCVD
-Atomic layer deposition ALD
-Identification of trace contaminants
-Material permeability test
ACT has been committed to mass spectrometry research and development and market application. The company's R&D team comes from universities, research institutes and the vacuum industry, with more than ten years of R&D experience. The PGT series is a domestic RGA independently developed by a professional team. With its in-depth research and development of mass spectrometry, unique product design and complete service system, we provide complete application solutions to customers in different fields. ACT has become a high-quality partner of many domestic universities and semiconductor companies, and has a stable and reliable supplier system. The instruments are extremely cost-effective in high-quality applications, making them an ideal product for users.
Technical parameters | ||||
model | PGT100F | PGT100M | PGT200F | PGT200M |
Sensor length | 14.4cm | 19.6cm | 14.4cm | 19.6cm |
Mass range | 100amu | 100amu | 200amu | 200amu |
Resolution(1) | <1amu | <1amu | <1amu | <1amu |
Filament type options | Ytttrium oxide coated iridium filament dual filament/dual tungsten filament | Ytttrium oxide coated iridium filament dual filament/dual tungsten filament | Ytttrium oxide coated iridium filament dual filament/dual tungsten filament | Dual coated yttrium oxide iridium filament dual filament/dual tungsten filament |
Detector type | FC | EM | FC | EM |
Sensitivity(FC) | 2.3E-6A/Pa | 2.3E-6A/Pa | 2.3E-6A/Pa | 2.3E-6A/Pa |
Sensitivity (EM) | - | 3.8A/Pa | - | 3.8A/Pa |
Minimum detectable partial pressure (2) | 3.5E-10Pa | 2E-12Pa | 3.5E-10Pa | 2E-12Pa |
Maximum sensor operating temperature (FC) | 200℃ | N/A | 200℃ | - |
Maximum sensor operating temperature (EM) | - | 150℃ | - | 150℃ |
Temperature coefficient (3) | <1%/℃ | <1%/℃ | <1%/℃ | <1%/℃ |
Maximum baking temperature | 300℃ | 300℃ | 300℃ | 300℃ |
Maximum data rate/point | 2ms | 2ms | 2ms | 2ms |
Maximum working pressure | 6.7E-2Pa | 6.7E-2Pa | 6.7E-2Pa | 6.7E-2Pa |
Power input | 24V (DC) | 24V (DC) | 24V (DC) | 24V (DC) |
(1) At 10% peak height (2) When the dwell time is 256ms (3) During the 8h period, after half an hour of warm-up, only FC mode | ||||
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