Views: 23 Author: Site Editor Publish Time: 2024-03-19 Origin: Site
Mass spectrometry is a technology based on mass analysis that can study and analyze the composition, structure, molecular weight and chemical reaction process of substances.In the semiconductor manufacturing process, mass spectrometry technology can be applied to material composition analysis, impurity detection, surface reaction research, material characterization, wafer contamination detection, etc.
Specific applications of mass spectrometry technology in semiconductor manufacturing processes
1. Material composition analysis
Mass spectrometry technology can analyze the atoms, molecules, ions and other components in materials to provide accurate data for process control.In the semiconductor manufacturing process, mass spectrometry technology can be used to analyze the element and impurity content in films prepared by chemical vapor deposition (CVD).
2. Surface reaction research
In the semiconductor processing process, surface chemical reactions are a key link.Mass spectrometry technology can monitor and analyze surface reactions online, and the data obtained from the analysis can be used to control and optimize the surface reaction process.
3. Material characterization
Mass spectrometry technology can be used to detect the molecular weight, distribution and chemical structure of materials.By analyzing the ion signals in the sample molecules, the molecular structure information of the sample can be obtained, thereby determining the chemical composition of the material.
4. Wafer contamination detection
Wafer contamination is an important issue in semiconductor processing.Mass spectrometry technology can conduct online detection of wafer contaminants, accurately detect the chemical composition of the wafer surface, and provide chemical information about the wafer surface for wafer contamination detection.
Mass spectrometry technology is widely used in semiconductor manufacturing processes and plays an irreplaceable role in material composition analysis, surface reaction research, material characterization, and wafer contamination detection. It is one of the important processes in semiconductor manufacturing processes.
Shanghai Aikerui launches process mass spectrometers for different applications, which are used in different processes of semiconductors;
PGA
Portable gas analyzer with lightweight portability and superior performance
MLS211
Multifunctional gas detection and analysis expert
Multi-functional gas detection and analysis expert
Wide range of applications
| dielectric etching | Metal etching |
| CVD monitoring | Cleanliness testing |
| Chamber matching | High aspect ratio etching |
| Atomic deposition | Atomic etching |
| free radical test |
Universal detection and analysis tool for real-time process control, resistant to corrosive gases, anti-condensation
In-situ platform for molecular analysis in semiconductor manufacturing
Provide real-time, actionable data
Using double Ir filament, more durable
BLD-02
Mobile gas detection and analysis expert
CT's innovative technology is designed to greatly improve the ease of use, performance and reliability of gas process detection analyzers, giving you peace of mind. It represents a new achievement of our technology that continues to focus on rapid gas analysis.
Gas detection has never been easier
Easy-to-use design for most common applications (qualitative and quantitative analysis of gases, gas process analysis, special leak detection, etc.)
Users can configure the connection method and set the parameters correctly according to their actual situation.
The intuitive touch screen interface provides operators, process engineers and maintenance technicians with a convenient menu of operations.
Excellent use and maintenance costs, excellent practical application performance, ease of use and convenience.
OGMS
Customized air release rate system for cleanliness verification of complex products
We focus on high-level analytical testing of product cleanliness
Key to our expert quality assurance is the correct determination of outgassing rates using mass spectrometry under high vacuum conditions.
We are expanding our product portfolio for residual gas analysis to provide higher levels of value creation, thereby increasing customer benefits
Modular mass spectrometry system to meet various testing requirements
Application areas
Cleanliness testing of semiconductor materials
Material cleaning monitoring
Material outgassing rate test
Application consulting and services
Application consulting
ACT application engineers will analyze your application and provide recommendations on how to optimize gas analysis testing
Service and support options
-ACT has a global network of professional service personnel and a variety of support options
-Achieve your needs
- Improve work efficiency
– Ensure your instrument is fully capable of complex applications
